| http://www.w3.org/ns/prov#value | - Typical process gases are flowed into a 5 liter reactor at the rate of, in standard cubic centimeters/minute (sccm), 100 sccm to 500 sccm of a methyl-substituted silane such as (CH3)SiH3, and 100 sccm to 500 sccm of an oxygen-containing gas such as O2.
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