About: http://webisa.webdatacommons.org/44649201

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 102 is made from any suitable material such as silicon and is preferably formed from a silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com