About: http://webisa.webdatacommons.org/44671553

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During the process, it has been discovered that it is highly desirable to control process conditions in such a manner as to control the rate of deposition and the quality of the resulting layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au