About: http://webisa.webdatacommons.org/44692649

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, there is a need for an apparatus and a method that facilitates calibration, tuning and monitoring of the conventional photolithographic stepper or scanner using the sensed aerial image.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk