About: http://webisa.webdatacommons.org/447032109

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	of the semiconductor chip, wherein the plasma etching process is highly selective with respect to materials other than the silicon. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es