PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Some process, such as etching, ion implantation or the like, is then accomplished through openings in the mask so formed on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com