About: http://webisa.webdatacommons.org/447546295

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 12 may be a silicon wafer or other semiconductor material suitable for use as an internal layer or support base of an integrated circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com