PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In one embodiment of the present invention, the dielectric layer comprises at least two layers including a first layer that contains an oxide based film and a second layer, which is formed on the first layer, that includes a polymer based film.
http://www.w3.org/ns/prov#wasQuotedFrom
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