About: http://webisa.webdatacommons.org/447954875

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an alternative embodiment, a more durable masking material such as polyimide may be coated and patterned lithographically, then cured at elevated temperature.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr