About: http://webisa.webdatacommons.org/448057384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An example in case the reduction in thickness of the second copper interconnection layer 1-2 is caused in a process except planarization will be described below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com