About: http://webisa.webdatacommons.org/448094774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In such a procedure, however, there is a problem in that both of the holes, one for the source region and one for the drain region, are blunted by the annealing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com