About: http://webisa.webdatacommons.org/448166998

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One example is a method of configuring the proximity head in one piece so that fluid may be introduced into the proximity head for delivery to the wafer surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com