About: http://webisa.webdatacommons.org/448193449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other instances, well-known semiconductor equipment and processes have not been described in particular detail so as to avoid obscuring the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca