About: http://webisa.webdatacommons.org/448406105

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By removing the film such as silicon nitride, the structure shown in FIG. 4(D) can be obtained.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es