PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • MEMS is an emerging technology in which Microscopic Machines are developed by the tools and techniques that were developed for the Integrated Circuit (IC)ndustry.
http://www.w3.org/ns/prov#wasQuotedFrom
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