About: http://webisa.webdatacommons.org/448558116

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1A is a sectional view showing an embodiment of a reactor of a thin film vapor deposition apparatus according to a first aspect of the present invention, and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com