About: http://webisa.webdatacommons.org/448584094

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4A is an exemplary process for fabricating an upper part of the housing of the gap changing microelectromechanical capacitive device in FIGS. 1A, 1B, and 1C.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com