About: http://webisa.webdatacommons.org/448623603

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross section of a rapid-heating, hot-wall CVD apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com