About: http://webisa.webdatacommons.org/448645639

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon is a material to which photoresist will more readily adhere than Si3N4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com