About: http://webisa.webdatacommons.org/449368946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Protective thin layer 20 protects the low-k material against future plasma damage, prevents subsequent carbon leaching, and has also been found to improve mechanical properties such as hardness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com