About: http://webisa.webdatacommons.org/449661773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	relative to the associated detection system, said apparatus including drive means responsive to said output signals for controlling the position of a substrate relative to said detectors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com