About: http://webisa.webdatacommons.org/449882935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	From the foregoing, it will be understood that since the by-product is a gas, it can quickly and easily be exhausted from the plasma etcher leaving a cleanly etched end product.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com