About: http://webisa.webdatacommons.org/450069132

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon oxide is the most preferable inorganic compound comprising inorganic thin layer.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com