About: http://webisa.webdatacommons.org/450135368

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Likewise, surface-micromechanical sensors may be formed, whose function would be impeded by the housing, such as acceleration sensors, rotation rate sensors, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com