About: http://webisa.webdatacommons.org/450185078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Diffusion barrier layer 323 is typically deposited by PVD methods and can be composed of materials such as Ta, TaNx, Ta/TaNx bi-layer, Ti, W, their nitrides, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com