About: http://webisa.webdatacommons.org/450186213

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the pressure is maintained high, the mean free path of the reactive gas is shortened to a range of from 0.05 mm to several millimeters, particularly to 1 mm or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk