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About:
http://webisa.webdatacommons.org/451094648
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
and/or an insulating material such as silicon oxide (SiOx), silicon nitride (SiNx), and silicon oxynitride (SiON).
http://www.w3.org/ns/prov#wasQuotedFrom
patents.com
