About: http://webisa.webdatacommons.org/451315783

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any material, such as metal, semiconductor (a silicon wafer, or the like), and insulating substance (such as glass, quartz, polymer film or the like), can be used as the substrate material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com