About: http://webisa.webdatacommons.org/451362836

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a second step of the process of the present invention, defects such as waveguides, cavities, etc., are patterned in photoresist layer 12 using an electron beam 14 as shown in FIG. 1( c).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr