About: http://webisa.webdatacommons.org/451386145

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Insulating layer 54 may be etched by any method readily known in the art, including immersion or spray-type wet etching, and plasma etching, ion milling, reactive ion-type dry etching, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com