| http://www.w3.org/ns/prov#value | - In other embodiments, substrate base 110 is itself a barrier (e.g., a glass wafer, aluminum foil, or other material that forms a diffusion barrier), and in those cases substrate 111 includes only substrate base 110 (since it does not need a separate barrier layer 120), and such a substrate only needs cover barrier 140 to complete the environmental seal.
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