About: http://webisa.webdatacommons.org/451776653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, materials for the vertical stack other than SiO2 can be used, such as SiON or SiN.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr