About: http://webisa.webdatacommons.org/451992400

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph for showing an example of a method of injecting source and purge gases for deposition of an atomic layer when forming the oxygen diffusion preventing layer of FIG. 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au