About: http://webisa.webdatacommons.org/452090661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross section of a conductive region of a wafer surface configured to conduct current to an edge region of the wafer surface, in accordance with a prior art method;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com