About: http://webisa.webdatacommons.org/452205085

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart of a preferred embodiment of a method for fabricating a thin film of layered superlattice material in accordance with the invention using a spin-coating technique;
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr