About: http://webisa.webdatacommons.org/452205300

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 37B is a sectional view which is taken along line 37B-37B of FIG. 37A and which shows another configuration of the wafer adhering section applied to the first to fourth embodiments;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com