About: http://webisa.webdatacommons.org/452213308

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a flowchart illustrating the present invention method for in-situ fabrication of thin films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com