About: http://webisa.webdatacommons.org/452226469

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thermal stability and wear resistance of Si-DLC were improved impressively than those of DLC, although mechanical properties such as hardness and adhesion were degradated.
http://www.w3.org/ns/prov#wasQuotedFrom	sae.org