About: http://webisa.webdatacommons.org/45224051

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ohmic contact layer and a layer including the source and drain electrodes are formed to have the same pattern.10-09-2008
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org