About: http://webisa.webdatacommons.org/452348836

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The slurry is applied to a moving surface such as a belt, pad, brush or the like to aid in the removal of material from a wafer surface in order to achieve a flat surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com