About: http://webisa.webdatacommons.org/45235017

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the present invention can naturally be used for cleaning other types of cleaning targets for example, a reticle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com