About: http://webisa.webdatacommons.org/452368992

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to an illumination device for illuminating an object such as a reticle used in the manufacture of semiconductor devices such as integrated circuits.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au