About: http://webisa.webdatacommons.org/452390601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This two-step etching prepares the surface to provide good adhesion of the composite film to a substrate having silicon, silicon dioxide, nitride or other materials on its
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com