About: http://webisa.webdatacommons.org/452393992

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The volume of the chamber is 18.4???10???3 m3, and the total flow rate of etching gas in the tables is a value obtained by dividing flow rate by the volume of the chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com