About: http://webisa.webdatacommons.org/452441684

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as set fourth in claim 17, wherein the substrate is a semiconductor material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es