About: http://webisa.webdatacommons.org/452715807

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CVD gases to be used for obtaining the carbon include hydrocarbons, particularly those having 1 to 6 carbon atoms, such as methane, natural gases, propane and benzene.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com