About: http://webisa.webdatacommons.org/452856090

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ILD layers may include, for example, silicon oxides, silicon nitrides, low dielectric constant (k) dielectrics, spun-on glasses, polymers, and other similar materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk