About: http://webisa.webdatacommons.org/452875965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferred embodiment of the present invention is a method and apparatus for stopping mechanical and chemical-mechanical polishing of a substrate at a desired endpoint.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au