About: http://webisa.webdatacommons.org/452946206

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a semiconductor device, and more particularly to a thin film transistor and a fabrication method therefor applying a self-aligned process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com