About: http://webisa.webdatacommons.org/453018124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gases described in the reference above such as Ar, O2, CF4 and H2, as well as C2F6, CHF3, CH2F2, CF3Br, N2, NF3, Cl2, CCl4, HBr and SF6 may be used as the etching gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com